Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5872062 | Method for etching titanium nitride layers | — | 1999-02-16 |
| 5792705 | Optimized planarization process for SOG filled vias | Chin-Kun Wang, Yuan-Chang Huang | 1998-08-11 |
| 5552343 | Method for tapered contact formation | — | 1996-09-03 |