Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8041440 | Method and system for providing a selection of golden tools for better defect density and product yield | Chang Yung Cheng, Ying-Lang Wang, Chin-Kun Wang | 2011-10-18 |
| 7359759 | Method and system for virtual metrology in semiconductor manufacturing | Chang Yung Cheng, Ying-Lang Wang, Fan-Tien Cheng | 2008-04-15 |
| 7184851 | Method of providing cassettes containing control wafers to designated processing tools and metrology tools | Yung-Cheng Chang, Hades Lee, Yi-Ping Huang | 2007-02-27 |