Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6359160 | MOCVD molybdenum nitride diffusion barrier for CU metallization | Shi-Chung Sun | 2002-03-19 |
| 6114242 | MOCVD molybdenum nitride diffusion barrier for Cu metallization | Shi-Chung Sun | 2000-09-05 |
| 5668054 | Process for fabricating tantalum nitride diffusion barrier for copper matallization | Shi-Chung Sun, Ming-Hsing Tsai | 1997-09-16 |