Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9605345 | Vertical furnace for improving wafer uniformity | Shih-Min Tseng, Sheng-Wei Wu, Jen-Chung Chen, Shih-Fang Chen | 2017-03-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9605345 | Vertical furnace for improving wafer uniformity | Shih-Min Tseng, Sheng-Wei Wu, Jen-Chung Chen, Shih-Fang Chen | 2017-03-28 |