Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982327 | CVD apparatus with multi-zone thickness control | Yi-Hsun Chiu, Cho-Han Li, Yao Dai | 2021-04-20 |
| 10975473 | CVD apparatus with multi-zone thickness control | Yi-Hsun Chiu, Cho-Han Li, Yao Dai | 2021-04-13 |
| 10450655 | CVD apparatus with multi-zone thickness control | Yi-Hsun Chiu, Cho-Han Li, Yao Dai | 2019-10-22 |
| 9953888 | Electromagnetic detection device and semiconductor manufacturing system | Yao Dai, Chih-Tung Lo, Ming-Hsien Tsai, Kai WU | 2018-04-24 |