Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10982327 | CVD apparatus with multi-zone thickness control | Chung-Wei Fang, Yi-Hsun Chiu, Yao Dai | 2021-04-20 |
| 10975473 | CVD apparatus with multi-zone thickness control | Chung-Wei Fang, Yi-Hsun Chiu, Yao Dai | 2021-04-13 |
| 10450655 | CVD apparatus with multi-zone thickness control | Chung-Wei Fang, Yi-Hsun Chiu, Yao Dai | 2019-10-22 |