Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8416555 | System for securely dechucking wafers | Pin Chia Su, Yu-Chih Liou | 2013-04-09 |
| 8000081 | Method and apparatus for safely dechucking wafers | Pin Chia Su, Yu-Chih Liou | 2011-08-16 |
| 7995323 | Method and apparatus for securely dechucking wafers | Pin Chia Su, Yu-Chih Liou | 2011-08-09 |