Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7139641 | Wafer protection system | — | 2006-11-21 |
| 6998013 | CMP apparatus polishing head with concentric pressure zones | Jiann Lih Wu | 2006-02-14 |
| 6964419 | Chuck rollers and pins for substrate cleaning and drying system | — | 2005-11-15 |
| 6758724 | Online tension monitor system for robot x-belt of mirra CMP | — | 2004-07-06 |
| 6516675 | Bubble ultrasonic flow meter | Chen-Chia Chiu | 2003-02-11 |