CS

Chih-Heng Shen

TSMC: 32 patents #1,063 of 12,232Top 9%
📍 Zhubei City, TW: #25 of 1,506 inventorsTop 2%
Overall (All Time): #112,471 of 4,157,543Top 3%
32
Patents All Time

Issued Patents All Time

Showing 26–32 of 32 patents

Patent #TitleCo-InventorsDate
5913979 Method for removing spin-on-glass at wafer edge Hui-Tzu Lin 1999-06-22
5783097 Process to avoid dielectric damage at the flat edge of the water Chi-Shen Lo, Chao-Hsin Chang, Chia-Hsiang Chen, Hsien-Wen Chang 1998-07-21
5747383 Method for forming conductive lines and stacked vias Li-Chun Chen 1998-05-05
5723385 Wafer edge seal ring structure Hui-Tzu Lin 1998-03-03
5668401 Chessboard pattern layout for scribe lines Ying-Chen Chao 1997-09-16
5591673 Tungsten stud process for stacked via applications Ying-Chen Chao, Yi-Dong Yan 1997-01-07
5492868 Capped reflow process to avoid contact autodoping and supress tungsten silicide peeling Ting-Hao Lin, Chung-An Lin 1996-02-20