Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359307 | In situ and tunable deposition of a film | Yen-Yu Chen, Jen-Hao Chien | 2025-07-15 |
| 12334319 | Physical vapor deposition (PVD) with target erosion profile monitoring | Yen-Yu Chen | 2025-06-17 |
| 12237159 | Deposition apparatus, deposition target structure, and method | Yen-Yu Chen | 2025-02-25 |
| 12198927 | Deposition system and method | Yen-Yu Chen | 2025-01-14 |
| 12180576 | PVD target design and semiconductor devices formed using the same | Yen-Yu Chen, Yi-Chih Chen, Shih Wei Bih | 2024-12-31 |
| 12165898 | Adjustable wafer chuck | Yen-Yu Chen | 2024-12-10 |
| 12094698 | Physical vapor deposition apparatus and method thereof | Kun-Che Ho, Yen-Yu Chen | 2024-09-17 |
| 11823878 | Deposition apparatus, deposition target structure, and method | Yen-Yu Chen | 2023-11-21 |
| 11725270 | PVD target design and semiconductor devices formed using the same | Yen-Yu Chen, Yi-Chih Chen, Shih Wei Bih | 2023-08-15 |
| 11688591 | Physical vapor deposition apparatus and method thereof | Kun-Che Ho, Yen-Yu Chen | 2023-06-27 |
| 11462394 | Physical vapor deposition apparatus and method thereof | Kun-Che Ho, Yen-Yu Chen | 2022-10-04 |
| 10113228 | Method for controlling semiconductor deposition operation | Chung-Liang Cheng, Sheng-Wei Yeh, Wei-Jen Chen, Yen-Yu Chen, Chang-Sheng Lee +1 more | 2018-10-30 |