Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8264662 | In-line particle detection for immersion lithography | Li-Jui Chen, Tsai-Sheng Gau | 2012-09-11 |
| 8091504 | Method and apparatus for cleaning spin coater | Chun-Jen Hsieh, Wen-Hao Yang, Hung-Tai Tsao | 2012-01-10 |
| 5702624 | Compete hot plate temperature control system for hot treatment | Ching-Wen Liao, Chin-Chuan Kuo, Tsun-Ching Lin | 1997-12-30 |