Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6872667 | Method of fabricating semiconductor device with separate periphery and cell region etching steps | Hung-Cheng Sung | 2005-03-29 |
| 6350390 | Plasma etch method for forming patterned layer with enhanced critical dimension (CD) control | Chi Kang Liu, Pei-Hung Chen | 2002-02-26 |