Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6514672 | Dry development process for a bi-layer resist system | Chia-Shiung Tsai, Ying-Ying Wang | 2003-02-04 |
| 6268287 | Polymerless metal hard mask etching | Chia-Shiung Tsai, Ming-Hsin Huang | 2001-07-31 |
| 6255022 | Dry development process for a bi-layer resist system utilized to reduce microloading | Chia-Shiung Tsai, Ying-Ying Wang | 2001-07-03 |