Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10247539 | Two-channel point-diffraction interferometer | Mariia Voznesenskaia, Tatiana Voznesenskaia | 2019-04-02 |
| 10204197 | Coupled-domains disturbance matrix generation for fast simulation of wafer topography proximity effects | Ralf Juengling | 2019-02-12 |
| 10012491 | Large numerical aperture phase-shifting dual pinhole diffraction interferometer and its test method | Dongmei Ma, Chunshui Jin, Haitao Zhang, Jie Yu, Mariia Voznesenskaia +2 more | 2018-07-03 |
| 8719736 | Compact and accurate wafer topography proximity effect modeling for full chip simulation | Hongbo Zhang, Qiliang Yan, Ebo Croffie | 2014-05-06 |