Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930387 | Dicing tape and die ejection method | Flavio Pardo | 2005-08-16 |
| 6900575 | Multiple mechanical resonator parametric device | Anatoli Olkhovets, Harold G. Craighead, Jeeak M. Parpia | 2005-05-31 |
| 6846087 | Micromirror having counterbalancing structures and method for manufacturing same | Christopher Frye, Timofei Nikita Kroupenkine, Victor A. Lifton, Michael P. Schlax, Alex T. Tran +1 more | 2005-01-25 |
| 6743988 | Optically controlled switches | Zhenan Bao, David J. Bishop, Robert A. Boie, Edwin Arthur Chandross, Peter Kian-Hoon Ho | 2004-06-01 |
| 6519075 | Packaged MEMS device and method for making the same | Dennis S. Greywall, Sungho Jin, Flavio Pardo, Hyongsok Soh | 2003-02-11 |
| 6515751 | Mechanically resonant nanostructures | Harold G. Craighead, Lidija Sekaric | 2003-02-04 |
| 6442307 | Solder-packaged optical MEMs device and method for making the same | Dennis S. Greywall, Sungho Jin, Flavio Pardo, Hyongsok Soh | 2002-08-27 |