YA

Yasuaki Amano

SG Suss Microtec Lithography Gmbh: 1 patents #27 of 59Top 50%
Overall (All Time): #2,713,659 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10937681 Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner Sven Hansen, Lennert Schwart 2021-03-02