Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937681 | Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner | Yasuaki Amano, Sven Hansen | 2021-03-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10937681 | Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask aligner | Yasuaki Amano, Sven Hansen | 2021-03-02 |