Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8147630 | Method and apparatus for wafer bonding with enhanced wafer mating | — | 2012-04-03 |
| 8139219 | Apparatus and method for semiconductor wafer alignment | — | 2012-03-20 |
| 7948034 | Apparatus and method for semiconductor bonding | Etienne Hancock, Robert H. Campbell | 2011-05-24 |
| 6829988 | Nanoimprinting apparatus and method | Hale Johnson, David T. Meyer | 2004-12-14 |
| 6178361 | Automatic modular wafer substrate handling device | Tim Peery, Timothy Consentino, Michael Kühnle, Seth Wright, James T. Ziegler | 2001-01-23 |
| 5622400 | Apparatus and method for handling semiconductor wafers | — | 1997-04-22 |