Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7220678 | Method for etching of a silicon substrate and etching apparatus | Yoshiyuki Nozawa, Hiroaki Kouno | 2007-05-22 |
| 5413769 | Clad fine wire electrode-type activated species-generating apparatus | Sachiko Okazaki, Masuhiro Kogoma, Masahiro Hirakawa | 1995-05-09 |