Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8628676 | Plasma etching method | Naoya Ikemoto, Takashi Yamamoto | 2014-01-14 |
| 8546265 | Method, apparatus and program for manufacturing silicon structure | Takashi Yamamoto | 2013-10-01 |
| 8518283 | Plasma etching method capable of detecting end point and plasma etching device therefor | Takashi Yamamoto, Masahiko Tanaka, Shoichi Murakami | 2013-08-27 |
| 7220678 | Method for etching of a silicon substrate and etching apparatus | Kazuo Kasai, Hiroaki Kouno | 2007-05-22 |