Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10504706 | Sputtering target and method for producing the same | Ken Okamoto, Akishige Sato, Sachio Miyashita, Eiji Kusano, Muneaki Sakamoto | 2019-12-10 |
| 9824868 | Sputtering target and method for producing the same | Ken Okamoto, Akishige Sato, Sachio Miyashita, Eiji Kusano, Muneaki Sakamoto | 2017-11-21 |
| 8231967 | Surface-treated ceramic member, method for producing the same and vacuum processing apparatus | Katsuaki Nakano, Junichi Itoh, Daisuke Hiramatsu, Ken Okamoto | 2012-07-31 |
| 8158544 | Yttria sintered body and component used for plasma processing apparatus | Ken Okamoto | 2012-04-17 |
| 7160825 | Machinable ceramic | Shunichi Etoh, Yasuki Yoshitomi, Kuniaki Nakagawa, Kazumasa Mori | 2007-01-09 |
| 7112549 | Low thermal expansion ceramic and member for exposure system | Yasuki Yoshitomi | 2006-09-26 |
| 5380511 | Process for producing silicon carbide-base complex | Shigetoshi Hayashi, Kazuhiro Minagawa | 1995-01-10 |