Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5589116 | Process for preparing a silicon carbide sintered body for use in semiconductor equipment | Shoichi Kojima, Haruyuki Kano, Tadaaki Miyazaki, Hiroaki Wada | 1996-12-31 |
| 5380511 | Process for producing silicon carbide-base complex | Tadahisa Arahori, Shigetoshi Hayashi | 1995-01-10 |
| 5318761 | Process for preparing silicon carbide powder for use in semiconductor equipment | Shoichi Kojima, Tasuku Saito, Tasuo Kurachi, Haruyuki Kano | 1994-06-07 |