Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694877 | Negative ion irradiation device | Hisashi Kitami, Tetsuya Yamamoto | 2023-07-04 |
| 6394025 | Vacuum film growth apparatus | Masaru Tanaka, Shunji Wada, Etsuo Ogino | 2002-05-28 |
| 6245394 | Film growth method and film growth apparatus capable of forming magnesium oxide film with increased film growth speed | Masaru Tanaka | 2001-06-12 |
| 6220204 | Film deposition method for forming copper film | Hiroyuki Makino, Masaru Tanaka, Kiyoshi Awai | 2001-04-24 |
| 6160350 | Ion plating apparatus | Masaru Tanaka | 2000-12-12 |
| 6021737 | Ion plating apparatus that prevents wasteful consumption of evaporation material | Masaru Tanaka | 2000-02-08 |
| 5677012 | Plasma processing method and plasma processing apparatus | Masaru Tanaka | 1997-10-14 |
| 5157233 | Electromagnetic induction heater for heating a continuous thin sheet without undulation | Masatomi Inokuma, Morio Maeda | 1992-10-20 |