KA

Kiyoshi Awai

SI Sumitomo Heavy Industries: 1 patents #424 of 917Top 50%
Overall (All Time): #3,579,335 of 4,157,543Top 90%
1
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6220204 Film deposition method for forming copper film Hiroyuki Makino, Masaru Tanaka, Toshiyuki Sakemi 2001-04-24