Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5058526 | Vertical load-lock reduced-pressure type chemical vapor deposition apparatus | Kenji Fukumoto, Satoshi Takeda | 1991-10-22 |
| 4962726 | Chemical vapor deposition reaction apparatus having isolated reaction and buffer chambers | Kenji Fukumoto | 1990-10-16 |