Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7052624 | Manufacturing method for an electronic device, and the electronic device | Tetsuya Matsutani | 2006-05-30 |
| 6939806 | Etching memory | — | 2005-09-06 |
| 6856020 | Semiconductor device and method for fabricating the same | Shinichi Imai | 2005-02-15 |
| 6787445 | Method for fabricating semiconductor device | Shinichi Imai | 2004-09-07 |
| 6703711 | Semiconductor device and method for fabricating the same | Shinichi Imai | 2004-03-09 |
| 6669812 | Apparatus and method for fabricating semiconductor device | — | 2003-12-30 |
| 6518169 | Semiconductor device and method for fabricating the same | Shinichi Imai | 2003-02-11 |
| 6500769 | Semiconductor device and method for fabricating the same | Shinichi Imai | 2002-12-31 |
| 6251216 | Apparatus and method for plasma processing | Hideaki Okamura, Shinichi Imai, Yoko Tohmori | 2001-06-26 |
| 6214740 | Semiconductor manufacturing apparatus | Shinichi Imai, Hideo Nikoh | 2001-04-10 |
| 6069092 | Dry etching method and semiconductor device fabrication method | Shinichi Imai | 2000-05-30 |
| 6057247 | Method for fabricating semiconductor device and method for controlling environment inside reaction chamber of dry etching apparatus | Shinichi Imai | 2000-05-02 |
| 5989929 | Apparatus and method for manufacturing semiconductor device | Hideo Nikoh, Shinichi Imai, Satoshi Nakagawa, Shoji Matsumoto, Yoji Bito | 1999-11-23 |