Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7244625 | Plasma processing method and plasma processing device | Katsuhiko Onishi | 2007-07-17 |
| 5989929 | Apparatus and method for manufacturing semiconductor device | Hideo Nikoh, Shinichi Imai, Nobuhiro Jiwari, Satoshi Nakagawa, Shoji Matsumoto | 1999-11-23 |
| 5840200 | Method of manufacturing semiconductor devices | Satoshi Nakagawa, Toyoji Ito, Yoshihisa Nagano | 1998-11-24 |