Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4870289 | Apparatus for controlling relation in position between a photomask and a wafer | Takeo Sato, Shinichiro Aoki, Katsumasa Yamaguchi, Tadashi Kaneko, Noboru Nomura +1 more | 1989-09-26 |