Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7972763 | Chemically amplified positive resist composition | Makoto Akita, Kazuhiko Hashimoto | 2011-07-05 |
| 7794913 | Chemically amplified positive resist composition | Makoto Akita, Kazuhiko Hashimoto | 2010-09-14 |
| 7667050 | Salt suitable for an acid generator and a chemically amplified positive resist composition containing the same | Junji Shigematsu, Isao Yoshida, Yukako Harada | 2010-02-23 |
| RE40964 | Negative type resist composition | Takehiro Kusumoto, Naoki Takeyama, Masanori Shinada | 2009-11-10 |
| 7202010 | Chemical amplification type positive resist composition | Airi Yamada, Yasunori Uetani | 2007-04-10 |
| 7144674 | Positive resist composition | Katsuhiko Namba, Koshiro Ochiai | 2006-12-05 |
| 6828079 | Chemical amplification type positive resist composition | Airi Yamada, Yasunori Uetani | 2004-12-07 |
| 6762007 | Chemical amplification type positive resist composition | Katsuhiko Namba, Koshiro Ochiai | 2004-07-13 |
| 6696218 | Chemical amplification type positive resist composition | Kunihiro Ichimura, Tsugio Okudaira, Yasunori Uetani, Katsuhiko Namba | 2004-02-24 |
| 6689531 | Resist composition | Sang Tae Kim, Seung Jin Kang, Shi-Jin Sung, Airi Yamada | 2004-02-10 |
| 6329119 | Negative type resist composition | Takehiro Kusumoto, Naoki Takeyama, Masanori Shinada | 2001-12-11 |
| 6284863 | Polymers having O-substituted vinylphenol unit and resist compositions containing them | Yoshiteru Ohta, Sang Tae Kim | 2001-09-04 |
| 5476320 | Developer preparing apparatus and developer preparing method | Satoshi Taguchi, Tsutomu Nagase, Norikazu Nakagawa | 1995-12-19 |