Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8298746 | Chemically amplified positive resist composition | Junji Shigematsu, Takayuki Miyagawa, Akira Kamabuchi | 2012-10-30 |
| 7566522 | Chemically amplified resist composition | Yoshiyuki Takata, Takayuki Miyagawa | 2009-07-28 |
| 5843616 | Positive resist composition | Yuji Yoshida, Kazuhiko Hashimoto, Haruyoshi Osaki | 1998-12-01 |