Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10338005 | Apparatus for inspecting back surface of epitaxial wafer and method of inspecting back surface of epitaxial wafer using the same | Hideaki Kinbara, Masahiko Egashira | 2019-07-02 |
| 10161883 | Wafer inspection method and wafer inspection apparatus | Masahiko Egashira, Tomokatsu Uchino | 2018-12-25 |