Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10718722 | Method of inspecting back surface of epitaxial wafer, epitaxial wafer back surface inspection apparatus, method of managing lift pin of epitaxial growth apparatus, and method of producing epitaxial wafer | Keiko Matsuo, Naoyuki Wada | 2020-07-21 |
| 10338005 | Apparatus for inspecting back surface of epitaxial wafer and method of inspecting back surface of epitaxial wafer using the same | Tatsuya OSADA, Hideaki Kinbara | 2019-07-02 |
| 10161883 | Wafer inspection method and wafer inspection apparatus | Tatsuya OSADA, Tomokatsu Uchino | 2018-12-25 |