Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7383156 | Apparatus for inspecting wafer surface, method for inspecting wafer surface, apparatus for judging defective wafer, method for judging defective wafer, and apparatus for processing information on wafer surface | Kouzou Matsusita, Yukinori Matsumura, Tomikazu Tanuki, Mitsuo Terada, Kotaro Hori +2 more | 2008-06-03 |