Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5714407 | Etching agent, electronic device and method of manufacturing the device | Matagoro Maeno, Masayuki Miyashita, Tatsuhiro Yabune, Jun Takano, Hirofumi Fukui +5 more | 1998-02-03 |
| 5277835 | Surface treatment agent for fine surface treatment | Tadahiro Ohmi, Masahiro Miki | 1994-01-11 |
| 5149378 | Tungsten film forming apparatus | Tadahiro Ohmi, Nobuhiro Miki, Matagoroh Maeno | 1992-09-22 |
| 5100495 | Dry etching apparatus with diluted anhydrous hydrogen fluoride gas generator | Tadahiro Ohmi, Masahiro Miki, Matagoro Maeno | 1992-03-31 |
| 5073232 | Method of anhydrous hydrogen fluoride etching | Tadahiro Ohmi, Masahiro Miki, Matagoro Maeno | 1991-12-17 |
| 5009963 | Metal material with film passivated by fluorination and apparatus composed of the metal material | Tadahiro Ohmi, Masahiro Miki, Matagoro Maeno | 1991-04-23 |
| 4795582 | Surface treating composition for micro processing | Tadahiro Ohmi, Nobuhiro Miki | 1989-01-03 |