Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5149378 | Tungsten film forming apparatus | Tadahiro Ohmi, Nobuhiro Miki, Hirohisa Kikuyama | 1992-09-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5149378 | Tungsten film forming apparatus | Tadahiro Ohmi, Nobuhiro Miki, Hirohisa Kikuyama | 1992-09-22 |