Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7094355 | Local dry etching method | Michihiko Yanagisawa | 2006-08-22 |
| 6875701 | Nanotopography removing method | Michihiko Yanagisawa | 2005-04-05 |
| 6649528 | Local dry etching method | Michihiko Yanagisawa | 2003-11-18 |
| 6429399 | Discharge tube for a local etching apparatus and a local etching apparatus using the discharge tube | Michihiko Yanagisawa | 2002-08-06 |