Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8263495 | Release accumulative charges by tuning ESC voltages in via-etchers | Ting-Yi Lin, Chi-Yuan Wen, Chuang Tse Chuan, Miau-Shing Tsay | 2012-09-11 |
| 8038510 | Apparatus and method for spiral polishing with electromagnetic abrasive | Hsinn-Jyh Tzeng, Jen-Chou Hsiung, Yan-Cherng Lin, Shun-Fua Su, Chia-Tsung Chang | 2011-10-18 |
| 7938716 | Apparatus and method for spiral polishing with electromagnetic abrasive | Hsinn-Jyh Tzeng, Jen-Chou Hsiung, Yan-Cherng Lin, Shun-Fua Su, Chia-Tsung Chang | 2011-05-10 |