Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11149347 | Process for etching, and chamber cleaning and a gas therefor | Robert Wieland, Jamila Boudaden | 2021-10-19 |
| 8752572 | Bundle trailer for gas delivery | Yuk-Hwan Park, Woo Jin Cho | 2014-06-17 |
| 6723153 | Isolation of SF6 from insulating gases in gas-insulated lines | Thomas Schwarze, Heinz-Joachim Belt | 2004-04-20 |
| 6706090 | Method for recovering and/or separating sulfur oxyfluorides from gas mixtures | Heinz-Joachim Belt, Matthias Rieland, Thomas Schwarze | 2004-03-16 |
| 6454837 | Separation of gases containing SF6 | Thomas Schwarze, Heinz-Joachim Belt, Pierre Barthelemy | 2002-09-24 |
| 6105631 | Preparation of homogeneous gas mixtures with SF.sub.6 | Hans-Peter Wickel, Reiner Distel, Heinz-Joachim Belt | 2000-08-22 |
| 6083398 | Process for the decoloration and detoxification of aqueous effluents | Karl Gregor, Ludwich Bettens | 2000-07-04 |