Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11435308 | CO2 sensor and method for manufacturing same | Benjamin Gruber | 2022-09-06 |
| 11149347 | Process for etching, and chamber cleaning and a gas therefor | Michael Pittroff, Robert Wieland | 2021-10-19 |