Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424476 | Electrostatic chuck, substrate fixing device and paste | Michio Horiuchi | 2025-09-23 |
| 10655746 | Solenoid valve | Hiroki Yahashi, Koji Kida, Akio Nakamura, Takuya Suzuki | 2020-05-19 |
| 10629920 | Valve unit | Hiroki Yahashi, Koji Kida | 2020-04-21 |