| 12033854 |
Method for manufacturing a composite structure comprising a thin layer of monocrystalline SiC on a carrier substrate of polycrystalline SiC |
Jean-Marc Bethoux, Damien Radisson |
2024-07-09 |
| 11595021 |
Saw resonator comprising layers for attenuating parasitic waves |
Thu Trang Vo, Jean-Sebastien Moulet, Alexandre Reinhardt, Isabelle Huyet, Alexis Drouin |
2023-02-28 |
| 11469367 |
Method for separating a removable composite structure by means of a light flux |
Jean-Marc Bethoux, Guillaume Besnard |
2022-10-11 |
| 11462676 |
Method for adjusting the stress state of a piezoelectric film and acoustic wave device employing such a film |
Jean-Marc Bethoux, Damien Radisson |
2022-10-04 |
| 9679777 |
Process, stack and assembly for separating a structure from a substrate by electromagnetic radiation |
Jean-Marc Bethoux, Oleg Kononchuk |
2017-06-13 |
| 9659777 |
Process for stabilizing a bonding interface, located within a structure which comprises an oxide layer and structure obtained |
Didier Landru, Carole David, Ionut Radu, Lucianna Capello |
2017-05-23 |
