Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10453697 | Methods of measuring electrical characteristics during plasma etching | Elena Becerra Woodard, Dean G. Scott | 2019-10-22 |
| 10083838 | Methods of measuring electrical characteristics during plasma etching | Elena Becerra Woodard, Dean G. Scott | 2018-09-25 |
| 9905484 | Methods for shielding a plasma etcher electrode | Elena Becerra Woodard, Dean G. Scott | 2018-02-27 |
| 9870963 | Endpoint booster systems and methods for optical endpoint detection | Elena Becerra Woodard, Kelly Yuji Kimura | 2018-01-16 |
| 9865491 | Devices for methodologies related to wafer carriers | Elena Becerra Woodard, David J. Zapp, Steve Canale, Hyong-yong Lee, Daniel Eduardo Sanchez +1 more | 2018-01-09 |
| 9711364 | Methods for etching through-wafer vias in a wafer | Elena Becerra Woodard, Dean G. Scott | 2017-07-18 |
| 9576838 | Devices for methodologies related to wafer carriers | Elena Becerra Woodard, David J. Zapp, Steve Canale, Hyong-yong Lee, Daniel Eduardo Sanchez +1 more | 2017-02-21 |
| 9478428 | Apparatus and methods for shielding a plasma etcher electrode | Elena Becerra Woodard, Dean G. Scott | 2016-10-25 |
| 8357263 | Apparatus and methods for electrical measurements in a plasma etcher | Elena Becerra Woodard, Dean G. Scott | 2013-01-22 |