Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6177142 | Method of forming a film on a substrate | — | 2001-01-23 |
| 6112695 | Apparatus for plasma deposition of a thin film onto the interior surface of a container | — | 2000-09-05 |
| 6068884 | Method of making low .kappa. dielectric inorganic/organic hybrid films | Peter Rose, Eugene Lopata | 2000-05-30 |
| 6015595 | Multiple source deposition plasma apparatus | — | 2000-01-18 |
| 5904952 | Method of plasma enhanced silicon oxide deposition | Eugene Lopata | 1999-05-18 |
| 5516555 | Evaporation method for forming a gas barrier film having an organosilicon dispersed discontinuously in an inorganic matrix | — | 1996-05-14 |
| 5434008 | Thin gas barrier films | — | 1995-07-18 |
| 5364665 | Method for rapid plasma treatments | Hood Chatham, Joseph Countrywood, Robert J. Nelson | 1994-11-15 |
| 5224441 | Apparatus for rapid plasma treatments and method | Hood Chatham, Joseph Countrywood, Robert J. Nelson | 1993-07-06 |
| 4888199 | Plasma thin film deposition process | Eugene Lopata | 1989-12-19 |
| 4847469 | Controlled flow vaporizer | James J. Hofmann, Robert R. Hoffman, Jr. | 1989-07-11 |