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Monocrystalline semiconductor wafer comprising defect-reduced regions and method for producing it |
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2012-07-10 |
| 8088219 |
Monocrystalline semiconductor wafer comprising defect-reduced regions and method for producing it |
Dieter Knerer, Andreas Huber, Friedrich Passek |
2012-01-03 |
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Process for producing silicon semiconductor wafers with defined defect properties, and silicon semiconductor wafers having these defect properties |
Wilfried von Ammon, Walter Haeckl, Andreas Huber |
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2006-10-17 |
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Method for the production of a silica glass crucible with crystalline regions from a porous silica glass green body |
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Process for producing a single crystal |
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2001-05-08 |
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Process for producing silicon semiconductor wafers with low defect density |
Dieter Graef, Wilfried Ammon, Reinhold Wahlich, Peter Krottenthaler |
1999-08-10 |