Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10137483 | Ultrasonic cleaning method | Yoshihiro Mori, Teruo Haibara, Etsuko Kubo | 2018-11-27 |
| 9773688 | Ultrasonic cleaning method and ultrasonic cleaning apparatus | Teruo Haibara, Etsuko Kubo, Yoshihiro Mori | 2017-09-26 |
| 9662687 | Ultrasonic cleaning method | Yoshihiro Mori, Teruo Haibara, Etsuko Kubo | 2017-05-30 |
| 9457385 | Ultrasonic cleaning method and ultrasonic cleaning apparatus | Yoshihiro Mori, Teruo Haibara, Etsuko Kubo | 2016-10-04 |
| 8778085 | Dissolved nitrogen concentration monitoring method, substrate cleaning method, and substrate cleaning apparatus | Teruo Haibara, Etsuko Kubo, Yoshihiro Mori | 2014-07-15 |
| 8575571 | Cleaning apparatus, measurement method and calibration method | Teruo Haibara, Yoshihiro Mori, Etsuko Kubo | 2013-11-05 |