Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303332 | Silicon single crystal substrate and method of manufacturing the same | Masamichi Ohkubo, Hikaru Sakamoto | 2016-04-05 |
| 8961685 | Method of manufacturing silicon single crystal, silicon single crystal, and wafer | Masamichi Ohkubo | 2015-02-24 |
| RE45238 | Silicon wafer and method of manufacturing the same | Masayuki Fukuda | 2014-11-11 |
| 8872307 | P-type silicon single crystal and method of manufacturing the same | — | 2014-10-28 |
| 8835284 | Method of manufacturing annealed wafer | Masamichi Ohkubo | 2014-09-16 |
| 8545622 | Annealed wafer and manufacturing method of annealed wafer | Koji Fukuhara | 2013-10-01 |
| 8524001 | Silicon wafer and method for producing the same | Atsushi Ikari, Masamichi Ohkubo | 2013-09-03 |
| 8524002 | Silicon wafer and method for producing the same | Masamichi Ohkubo | 2013-09-03 |
| 8382894 | Process for the preparation of silicon wafer with reduced slip and warpage | Masayuki Fukuda | 2013-02-26 |
| 8357939 | Silicon wafer and production method therefor | — | 2013-01-22 |
| 8343618 | Silicon wafer and method of manufacturing the same | Masayuki Fukuda | 2013-01-01 |
| 8241421 | Epitaxial wafer and production method thereof | Timo Mueller, Atsushi Ikari, Wilfried von Ammon, Martin Weber | 2012-08-14 |
| 8197594 | Silicon wafer for semiconductor and manufacturing method thereof | Wilfried von Ammon, Sei Fukushima, Herbert Schmidt, Martin Weber | 2012-06-12 |
| 8142885 | Silicon wafer and method for manufacturing the same | Sei Fukushima | 2012-03-27 |
| 7875115 | Epitaxial wafer and method for producing epitaxial wafers | Koji Fukuhara | 2011-01-25 |
| 7470323 | Process for producing p-doped and epitaxially coated semiconductor wafers from silicon | Wilfried von Ammon, Martin Weber, Herbert Schmidt, Atsushi Ikari | 2008-12-30 |
| 6548886 | Silicon semiconductor wafer and method for producing the same | Atsushi Ikari, Masami Hasebe, Hikaru Sakamoto, Wataru Ohashi, Taizo Hoshino +1 more | 2003-04-15 |