Issued Patents All Time
Showing 101–125 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6245161 | Economical silicon-on-silicon hybrid wafer assembly | Nathan W. Cheung | 2001-06-12 |
| 6207005 | Cluster tool apparatus using plasma immersion ion implantation | Nathan W. Cheung | 2001-03-27 |
| 6187110 | Device for patterned films | Nathan W. Cheung | 2001-02-13 |
| 6184111 | Pre-semiconductor process implant and post-process film separation | Nathan W. Cheung | 2001-02-06 |
| 6162705 | Controlled cleavage process and resulting device using beta annealing | Nathan W. Cheung | 2000-12-19 |
| 6159825 | Controlled cleavage thin film separation process using a reusable substrate | Nathan W. Cheung | 2000-12-12 |
| 6159824 | Silicon-on-silicon wafer bonding process using a thin film blister-separation method | Nathan W. Cheung | 2000-12-12 |
| 6155909 | Controlled cleavage system using pressurized fluid | Nathan W. Cheung | 2000-12-05 |
| 6153524 | Cluster tool method using plasma immersion ion implantation | Nathan W. Cheung | 2000-11-28 |
| 6146979 | Pressurized microbubble thin film separation process using a reusable substrate | Nathan W. Cheung | 2000-11-14 |
| 6103599 | Planarizing technique for multilayered substrates | Nathan W. Cheung | 2000-08-15 |
| 6083324 | Gettering technique for silicon-on-insulator wafers | Nathan W. Cheung | 2000-07-04 |
| 6048411 | Silicon-on-silicon hybrid wafer assembly | Nathan W. Cheung | 2000-04-11 |
| 6033974 | Method for controlled cleaving process | Nathan W. Cheung | 2000-03-07 |
| 6013567 | Controlled cleavage process using pressurized fluid | Nathan W. Cheung | 2000-01-11 |
| 6013563 | Controlled cleaning process | Nathan W. Cheung | 2000-01-11 |
| 6010579 | Reusable substrate for thin film separation | Nathan W. Cheung | 2000-01-04 |
| 5994207 | Controlled cleavage process using pressurized fluid | Nathan W. Cheung | 1999-11-30 |
| 5985742 | Controlled cleavage process and device for patterned films | Nathan W. Cheung | 1999-11-16 |
| 5801824 | Large area defect monitor tool for manufacture of clean surfaces | — | 1998-09-01 |
| 5790247 | Technique for determining defect positions in three dimensions in a transparent structure | Michael A. Bryan | 1998-08-04 |
| 5631733 | Large area defect monitor tool for manufacture of clean surfaces | — | 1997-05-20 |
| 5615039 | Electro-optical element and its manufacturing method | — | 1997-03-25 |
| 5570011 | Method for testing an electronic device using voltage imaging | — | 1996-10-29 |
| 5543729 | Testing apparatus and connector for liquid crystal display substrates | — | 1996-08-06 |