Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9170226 | Micromechanical substrate for a diaphragm with a diffusion barrier layer | Maximilian Fleischer, Oliver Freudenberg, Harry Hedler, Markus Schieber, Karl Weidner +2 more | 2015-10-27 |