Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7268436 | Electronic device with cavity and a method for producing the same | Robert Aigner, Albert Auburger, Frank Daeche, Andreas Meckes, Horst Theuss +1 more | 2007-09-11 |
| 5070735 | Pressure sensor | Hansjoerg Reichert, Karl Platzoeder | 1991-12-10 |
| 4761210 | Method for generating structures in micro-mechanics | Heinz Hagen, Klaus Becker | 1988-08-02 |