Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7290321 | Alignment apparatus and method for aligning stacked devices | Dan Steinberg, Mindaugas F. Dautartas | 2007-11-06 |
| 7086134 | Alignment apparatus and method for aligning stacked devices | Mindaugas F. Dautartas, Dan Steinberg | 2006-08-08 |
| 6964804 | Micromachined structures made by combined wet and dry etching | Dan Steinberg, David W. Sherrer | 2005-11-15 |
| 6885786 | Combined wet and dry etching process for micromachining of crystalline materials | Dan Steinberg | 2005-04-26 |